Micromachined Devices
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1. Micromachined microwave planar spiral inductors and transformers
A new micromachined planar spiral inductor, with the strips suspended individually, has been fabricated in standard GaAs high electron-mobility transistor monolithic-microwave integrated-circuit technology through maskless front-side bulk micromachining. The electronic compatibility, the use of industrial integrated-circuit production lines, the straightforw
Publicado em: 2011