Photolitograph
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1. Fabricação e caracterização de Guia de Onda Polimerica a base de PMMA modificado por plasma de CHF3 / Polymeric optical waveguides fabricated by plasma fluorination process
Polymeric optical devices have been studied in communication and interconnection optics due to the intrinsic versatility of polymers molecular structure, that allows advantageous refractive index modeling for core and cladding, and also to their easy fabrication process or patterning capability. PMMA, polymethylmetacrylate, shows the best optical properties
Publicado em: 2007