Semicondutores Gravura
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1. Contribuição ao estudo da deposição fotoeletroquimica de cobre silicio-p
: In this work a selective photoelectrochemical copper deposition was developed. The copper thin films was photodeposited from a standard aqueous plating solutions on p-Si. Copper is a promising candidate for use in electronic packaging and ultra-Iarge scale integrated (ULSI) devices due to its low resistivity. However, the thin film morphology is a very imp
Publicado em: 1997