Soi Silicon On Insulator Structures
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1. Fabricação de novas heteroestruturas a partir de estruturas SOI obtidas pela técnica smart-cut. / New semiconductor heterostructures based on SOI structures obtained by "smart-cut" process.
In this work we study new semiconductors heterostructures, based on SOI (Silicon-On- Insulator) structures obtained by "Smart-Cut" process, that were studied in the last years at Departamento de Engenharia de Sistemas Eletrônicos da Escola Politécnica da Universidade de São Paulo (EPUSP). This technique combines high-dose hydrogen ion implantation (I/I) a
Publicado em: 2006